This CVD SiC coated graphite carrier is designed for MOCVD and epitaxy processes. With 6N purity (99.99995%), 100um typical coating, and FCC beta-phase structure, it ensures high thermal uniformity and corrosion resistance. Ideal for wafer susceptors and trays.
Key Selling Points
Ultra-high purity: 99.99995% (6N) with total ash ≤5 ppm minimizes contamination for epitaxial quality.
Hard coating: 2500 Vickers (40 GPa) resists plasma bombardment and wear, extending component life.
Proven in mass production: 500 pcs/month to Asia-Pacific customer, with consistent epitaxial results.
Reduced downtime: Edge ring replacement frequency cut by 20% in continuous high-temp operation.
Technical Specifications
Parameter
Value
Model
CVD-01
Coating Thickness
100 μm typical (range 50-150 μm)
Purity Level
99.99995% (6N), total ash ≤5 ppm
Coating Hardness
2500 Vickers (40 GPa)
Crystal Structure
FCC beta-phase polycrystal, (111) oriented
Material
CVD SiC coated graphite
Application
Semiconductor epitaxy / RTP process
Models and Options
Standard model CVD-01. Customization available for size, pocket configuration, and coating thickness within 50-150 μm.
Materials and Structure
High-purity graphite substrate with dense CVD SiC coating. The FCC beta-phase structure provides excellent adhesion and thermal shock resistance.
Applications
Primary applications include MOCVD, epitaxial reactors, and rapid thermal processing (RTP) systems. Used for wafer carriers, susceptors, and trays requiring high temperature stability.
Customization
We offer custom sizes, pocket designs, and coating thicknesses to match your reactor. Contact us for specifications.
Case Study
Asia-Pacific Customer: 500 pcs/month for epitaxy process. Over 2 years continuous high-temperature operation. Achieved stable mass production with consistent epitaxial layer quality, and reduced edge ring replacement frequency by 20%.
FAQ
Q: What is the typical lead time?
Please contact us for current lead time.
Q: Can I get samples?
Yes, MOQ is 1 unit.
Q: How is the coating thickness controlled?
We control within 50-150 μm, typical 100 μm.
Q: What purity level is guaranteed?
6N (99.99995%) with total ash ≤5 ppm.
Q: Does the coating peel under thermal cycling?
No, our coating is designed to withstand rapid thermal cycling without peeling.
Q: What payment terms are available?
New customers: 100% T/T in advance; long-term customers: 70% T/T advance, 30% before shipment.
Q: Do you provide pre-shipment testing?
Yes, each order includes pre-shipment test.
Inquiry Information
Company: Semicera (Ningbo Miami Advanced Material Technology Co., LTD)
Contact: Frank | Email: sales05@semi-cera.com | Tel/WhatsApp: +86 15957878134
