Micro Thermal Mass Flow Meter SRK-DL for Semiconductor and Medical

Product Summary

The Silver Automation SRK-DL is a high-temperature thermal mass flow meter designed for ultra-low flow measurement from 2 sccm to 30 SLM. With ±1% F.S accuracy and multiple output options, it is the preferred choice for semiconductor manufacturing, medical devices, analytical instruments, fuel cells, and environmental monitoring. Its stainless steel construction ensures durability and compatibility with clean gases.

Key Selling Points

• Ultra-Low Flow Detection: Measures flow rates as low as 2 sccm, enabling precise control in critical processes such as gas mixing and leak detection. Source: product parameters (2 sccm ~ 30 SLM).
• High Accuracy ±1% F.S: Ensures reliable and repeatable measurements for demanding applications. Source: product parameters.
• Multiple Output & Communication: Supports 0-5V, 4-20mA, 1-5V analog outputs and RS232/485 with MODBUS protocol for easy integration. Source: product parameters.
• Stainless Steel Construction: Resists corrosion and maintains purity for semiconductor and medical gas lines. Source: material field.
• Versatile Power Supply: Operates on ±15 VDC or 24 VDC, accommodating various system configurations. Source: product parameters.

Technical Specifications

Models and Options

The SRK-DL is available as a standard model with the above specifications. Customization options include special gas calibration, different output ranges, and custom connectors. Please inquire with our sales team for tailored solutions.

Materials and Structure

The flow meter body is constructed from stainless steel, ensuring robustness and resistance to corrosion. The sensor is designed for high-temperature operation, suitable for hot gas streams.

Applications

• Semiconductor manufacturing – gas delivery and mixing
• Medical devices – anesthesia delivery, respiratory therapy
• Analytical instruments – gas chromatography, mass spectrometry
• Fuel cells – hydrogen and oxygen flow control
• Environmental monitoring – low-flow gas sampling

Customization

Silver Automation offers customization including special flow ranges, output signals, and pressure ratings. Contact us to discuss your specific requirements.

Case Study

Client: 2 sccm low flow air measurement (China)
Application: Detecting air leakage down to 2 sccm
Duration: More than 10 years
Result: Extremely sensitive detection of air leaks as low as 2 ml/min, providing reliable monitoring technology. Source: case study from related contents.

FAQ

1. Q: What is the minimum flow rate the SRK-DL can measure? A: The SRK-DL can measure flow rates as low as 2 sccm, making it ideal for minute gas flows.
2. Q: Can this flow meter be used for compressed air? A: Yes, it can measure compressed air flows, especially at low flow rates. For higher flows, please consider our other models.
3. Q: What communication protocols are supported? A: It supports RS232 and RS485 with MODBUS protocol.
4. Q: Is the meter suitable for high-temperature gases? A: Yes, the SRK-DL is a high-temperature thermal mass flow meter, designed for elevated temperatures.
5. Q: What is the power supply requirement? A: It can be powered by ±15 VDC or 24 VDC.
6. Q: What certifications does the meter have? A: The meter complies with CE, ATEX Zone 2, and ISO9001 standards. (Certificates available.)
7. Q: What is the delivery time? A: Most orders ship within 7-10 working days.
8. Q: Can I get a customized calibration? A: Yes, we offer custom calibration for specific gases and flow ranges.

Inquiry Information

For pricing and ordering, please contact:
Silver Automation Instruments
Sales: Lily
Phone: +86 25-52155837
WhatsApp: +86 18936759191
Email: sales@silverinstruments.com
MOQ: 1 unit
Delivery: EXW, FOB, CIF
Payment: 100% T/T in advance

Image Gallery

Product Front View

Product Angled View

Sensor Detail